JVB 21_1692.pdf (109.3 kB)
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Copyright(2003) American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society.The following article appeared in Journal of Vacuum Science a Technology B, 21(4),pp.1692-1699 ; 2003 and may be found at http://link.aip.org/link/?jvb/21/1692. |
JVB 21_1692.pdf
389d6465-7ac5-4c7c-a877-759fc7766fcc
https://nitech.repo.nii.ac.jp/record/5151/files/JVB 21_1692.pdf